Measurement of Fine Surface Profile with Two-wavelength Phase-shift Interferometry.
نویسندگان
چکیده
منابع مشابه
Two-wavelength phase shifting interferometry.
This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experi...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1991
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.57.1633